OBSERVATION DEVICE, OBSERVATION SYSTEM, AND METHOD FOR CONTROLLING OBSERVATION DEVICE

An observation device includes: an illumination system that is disposed on a downward side of a sample and emits illumination light from the downward side toward an upward side of the sample; an imaging system that is disposed on the downward side and images the sample with transmitted light that is...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SAKURAI, Ayumu, ITO, Shun, USUI, Shogo
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An observation device includes: an illumination system that is disposed on a downward side of a sample and emits illumination light from the downward side toward an upward side of the sample; an imaging system that is disposed on the downward side and images the sample with transmitted light that is reflected on the upward side in the illumination light emitted from the illumination system and is transmitted through the sample from the upward side to the downward side; and a control unit that executes imaging control using the illumination system and the imaging system. The control unit controls an exposure amount in correspondence with required time for the imaging control which includes required operation time and required pause time determined based on imaging conditions.