3D INTEGRATED CIRCUIT (3DIC) STRUCTURES AND METHODS FOR MANUFACTURING THE SAME

A 3D integrated circuit structure, comprising: a redistribution layer structure; a first semiconductor chip die on the redistribution layer structure; a plurality of sacrificial pads on the redistribution layer structure; a plurality of conductive posts disposed adjacent the first semiconductor chip...

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Bibliographische Detailangaben
Hauptverfasser: WU, Chengtar, KIM, Jongkook, YIM, Choongbin
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A 3D integrated circuit structure, comprising: a redistribution layer structure; a first semiconductor chip die on the redistribution layer structure; a plurality of sacrificial pads on the redistribution layer structure; a plurality of conductive posts disposed adjacent the first semiconductor chip die, wherein the plurality of conductive posts is on the plurality of sacrificial pads, respectively; a molding material that is on the first semiconductor chip die, the plurality of sacrificial pads, the plurality of conductive posts, and the redistribution layer structure; an interconnection structure on the molding material; and a second semiconductor chip die on the interconnection structure, wherein the second semiconductor chip die overlaps the first semiconductor chip die and the plurality of conductive posts in a vertical direction.