PROBE CARD AND TEST APPARATUS INCLUDING PROBE CARD

PROBE CARD AND TEST APPARATUS INCLUDING PROBE CARD

A semiconductor chip disposed on a wafer may be tested by using a probe card provided at an upper portion of a chamber for testing the semiconductor chip. A signal generated from a test module is transmitted to a needle included in the probe card, so that abnormality in the semiconductor chip may be...

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Hauptverfasser: KIM, Min Suk, HONG, Seung Il
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator KIM, Min Suk
HONG, Seung Il
description A semiconductor chip disposed on a wafer may be tested by using a probe card provided at an upper portion of a chamber for testing the semiconductor chip. A signal generated from a test module is transmitted to a needle included in the probe card, so that abnormality in the semiconductor chip may be tested.
format Patent
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title PROBE CARD AND TEST APPARATUS INCLUDING PROBE CARD
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