PROBE CARD AND TEST APPARATUS INCLUDING PROBE CARD

PROBE CARD AND TEST APPARATUS INCLUDING PROBE CARD

A semiconductor chip disposed on a wafer may be tested by using a probe card provided at an upper portion of a chamber for testing the semiconductor chip. A signal generated from a test module is transmitted to a needle included in the probe card, so that abnormality in the semiconductor chip may be...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KIM, Min Suk, HONG, Seung Il
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A semiconductor chip disposed on a wafer may be tested by using a probe card provided at an upper portion of a chamber for testing the semiconductor chip. A signal generated from a test module is transmitted to a needle included in the probe card, so that abnormality in the semiconductor chip may be tested.