INSPECTION APPARATUS

INSPECTION APPARATUS

An inspection apparatus includes a light source which radiates a beam, a first lens disposed between the inspection object and the light source with a first opening defined therethrough in a first direction, a second lens disposed between the inspection object and the first lens with a second openin...

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Hauptverfasser: HAN, SE-KWANG, SANGU, AKIFUMI, SON, JAEMIN, KO, HYERAN
Format: Patent
Sprache:eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator HAN, SE-KWANG
SANGU, AKIFUMI
SON, JAEMIN
KO, HYERAN
description An inspection apparatus includes a light source which radiates a beam, a first lens disposed between the inspection object and the light source with a first opening defined therethrough in a first direction, a second lens disposed between the inspection object and the first lens with a second opening defined therethrough in the first direction to overlap the first opening, an inspection unit disposed to be spaced apart from the inspection object with the first lens interposed therebetween and including an incidence portion disposed to overlap the first opening and the second opening on a plane, and a driving unit which adjusts a distance between the first lens and the inspection object or a distance between the second lens and the inspection object.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title INSPECTION APPARATUS
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