INSPECTION APPARATUS

An inspection apparatus includes a light source which radiates a beam, a first lens disposed between the inspection object and the light source with a first opening defined therethrough in a first direction, a second lens disposed between the inspection object and the first lens with a second openin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HAN, SE-KWANG, SANGU, AKIFUMI, SON, JAEMIN, KO, HYERAN
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	An inspection apparatus includes a light source which radiates a beam, a first lens disposed between the inspection object and the light source with a first opening defined therethrough in a first direction, a second lens disposed between the inspection object and the first lens with a second opening defined therethrough in the first direction to overlap the first opening, an inspection unit disposed to be spaced apart from the inspection object with the first lens interposed therebetween and including an incidence portion disposed to overlap the first opening and the second opening on a plane, and a driving unit which adjusts a distance between the first lens and the inspection object or a distance between the second lens and the inspection object.