PARTICLE MEASURING APPARATUS, ULTRAPURE WATER PRODUCTION APPARATUS HAVING THE SAME, AND PARTICLE MEASURING METHOD

A particle measuring apparatus is provided that has improved measurement accuracy regardless of particle diameters and that ensures prompt measurement. A particle measuring apparatus has: first and second particle counters that obtain a number of particles that are contained in water that flows in a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUDO, Fumio, KONDO, Tsukasa, ICHIHARA, Fumitaka, SUGAWARA, Hiroshi
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY PHYSICS TESTING TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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