MULTILAYER ELECTRODE, STRAIN RESISTANCE FILM WITH ELECTRODE, AND PRESSURE SENSOR

There is provided a multilayer electrode including a contact layer capable of being superposed on a strain resistance film; a diffusion prevention layer superposed on the contact layer; and a mounting layer superposed on the diffusion prevention layer, in which the diffusion prevention layer contain...

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Bibliographische Detailangaben
Hauptverfasser:	HAEMORI, Masamitsu, NAWAOKA, Kohei, KOBAYASHI, Masanori, SASAHARA, Tetsuya, UNNO, Ken
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	There is provided a multilayer electrode including a contact layer capable of being superposed on a strain resistance film; a diffusion prevention layer superposed on the contact layer; and a mounting layer superposed on the diffusion prevention layer, in which the diffusion prevention layer contains a transition element belonging to the fifth or sixth periods.