DEVICE FOR CONTROLLING OR MEASURING A FLUID
The invention relates to a device (1) for controlling or measuring a fluid, comprising: -a base part (2): -a microfabricated part (3) for measuring, controlling or regulating a fluid; -an inlet flow channel (4), extending from a flow inlet (34) in the base part to a flow inlet (5) of the microfabric...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The invention relates to a device (1) for controlling or measuring a fluid, comprising: -a base part (2): -a microfabricated part (3) for measuring, controlling or regulating a fluid; -an inlet flow channel (4), extending from a flow inlet (34) in the base part to a flow inlet (5) of the microfabricated part; and -an outlet flow channel (6), extending from a flow outlet (7) of the microfabricated part to a flow outlet (35) in the base part, characterized in that -the base part (2) and the microfabricated part (3) are separated by an intermediate layer (8), wherein the intermediate layer is attached to the base part via a first attachment means (11) and attached to the microfabricated part via a second attachment means (12). |
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