SiC SEMICONDUCTOR DEVICE
A SiC semiconductor device including a SiC semiconductor layer composed of SiC single crystal. The SiC semiconductor layer comprising a mounted surface on which an element is mounted, a non-mounted surface opposed to the mounted surface, and a side surface connecting the mounted surface to the non-m...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A SiC semiconductor device including a SiC semiconductor layer composed of SiC single crystal. The SiC semiconductor layer comprising a mounted surface on which an element is mounted, a non-mounted surface opposed to the mounted surface, and a side surface connecting the mounted surface to the non-mounted surface, wherein the side surface is on a cleavage plane of the SiC single crystal. |
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