SEMICONDUCTOR CHIP HAVING STEPPED CONDUCTIVE PILLARS

In an implementation, a semiconductor chip includes a device layer, an interconnect layer fabricated on the device layer, the interconnect layer including a conductive pad, and a conductive pillar coupled to the conductive pad. The conductive pillar includes at least a first portion having a first w...

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Bibliographische Detailangaben
Hauptverfasser: GHAHGHAHI, FARSHAD, HU, SUMING
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In an implementation, a semiconductor chip includes a device layer, an interconnect layer fabricated on the device layer, the interconnect layer including a conductive pad, and a conductive pillar coupled to the conductive pad. The conductive pillar includes at least a first portion having a first width and a second portion having a second width, the first portion being disposed between the second portion and the conductive pad, wherein the first width of the first portion is greater than the second width of the second portion.