METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

A method for manufacturing a semiconductor device includes forming a first organic insulating layer including a groove; forming a conductive layer formed from a conductive material on the first organic insulating layer to fill the groove with the conductive material; removing a portion of the conduc...

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Bibliographische Detailangaben
Hauptverfasser: MITSUKURA, Kazuyuki, TOBA, Masaya
Format: Patent
Sprache:eng
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