FLUID CONTROL DEVICE, FLUID CONTROL SYSTEM, FLUID CONTROL DEVICE PROGRAM, AND FLUID CONTROL METHOD

A fluid control device in which a fluid control valve, an upstream pressure sensor, a fluid resistance element, and a downstream pressure sensor are arranged in this order from an upstream side, includes: an actual flow rate calculation unit that calculates a flow rate on basis of pressures measured...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MATSUMOTO, Sota, NAGAI, Kentaro, MATSUURA, Kazuhiro
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROLLING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Beschreibung
Zusammenfassung:	A fluid control device in which a fluid control valve, an upstream pressure sensor, a fluid resistance element, and a downstream pressure sensor are arranged in this order from an upstream side, includes: an actual flow rate calculation unit that calculates a flow rate on basis of pressures measured by the upstream pressure sensor and the downstream pressure sensor; a delayed flow rate calculation unit that calculates a delayed flow rate by generating a response delay in the calculated flow rate calculated by the actual flow rate calculation unit; and a flow rate output unit that compares an absolute difference between a predetermined reference value and the calculated flow rate and an absolute difference between the reference value and the delayed flow rate, and outputs the calculated flow rate or the delayed flow rate having a smaller absolute difference.