SYSTEMS AND METHODS FOR VAPORIZATION AND VAPOR DISTRIBUTION

Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.

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Bibliographische Detailangaben
Hauptverfasser:	Barden, John, Ban, Zhigang, Liu, Litian, Powell, Rick, Xu, Yaojun, Vora, Nirav, Drennan, Jerry
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Distributor assemblies for vapor transport deposition systems, and methods of conducting vapor transport deposition, are described.