APPARATUS INCLUDING AIR GAP IN SCRIBE REGION OF SEMICONDUCTOR DEVICE

APPARATUS INCLUDING AIR GAP IN SCRIBE REGION OF SEMICONDUCTOR DEVICE

According to one or more embodiments, an apparatus includes an insulating structure in the scribe region, a plurality of metal layers, the metal layers including a top metal layer in the insulating structure in the scribe region, a groove on a top of the insulating structure in the scribe region, an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Sugioka, Shigeru
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:According to one or more embodiments, an apparatus includes an insulating structure in the scribe region, a plurality of metal layers, the metal layers including a top metal layer in the insulating structure in the scribe region, a groove on a top of the insulating structure in the scribe region, and an air gap between the top metal layer and the groove in the scribe region.