METHOD FOR FABRICATING SELECTOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
A method for fabricating a selector may include: forming an insulating layer; doping the insulating layer with dopants by performing an ion implantation process; and performing a subsequent process to the insulating layer doped with the dopants for restoring damage caused by the ion implantation pro...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | A method for fabricating a selector may include: forming an insulating layer; doping the insulating layer with dopants by performing an ion implantation process; and performing a subsequent process to the insulating layer doped with the dopants for restoring damage caused by the ion implantation process. |
|---|