Semiconductor Device and Method of Making a Substrate with Improved Substrate Mounting Apparatus

A manufacturing system includes a substrate disposed on a conveyer system. The conveyer system includes a pair of side supports. The substrate is moved on the conveyer system until the substrate is disposed over a bottom support block. The bottom support block is raised to physically contact the sub...

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Bibliographische Detailangaben
Hauptverfasser: Wu, Yao Hong, Lam, Wing Keung, Xian, Wei Ming, Tan, Hua Hong, Chow, Chee Kay, Cai, Zong Xiang
Format: Patent
Sprache:eng
Schlagworte:
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Zusammenfassung:A manufacturing system includes a substrate disposed on a conveyer system. The conveyer system includes a pair of side supports. The substrate is moved on the conveyer system until the substrate is disposed over a bottom support block. The bottom support block is raised to physically contact the substrate. A transfer arm module is provided. The transfer arm module includes a flat bottom surface and an opening formed in the flat bottom surface. The transfer arm module is disposed with the flat bottom surface physically contacting the substrate opposite the bottom support block. A vacuum is enabled through the opening of the transfer arm module. The substrate is lifted off the bottom support block using the vacuum. The substrate is moved over a printing pallet using the transfer arm module. The vacuum is disabled when the substrate is in a positioning area of the printing pallet.