METHOD OF MANUFACTURING ELECTRONIC DEVICE USING CYCLIC DOPING PROCESS, AND ELECTRONIC DEVICE MANUFACTURED BY THE SAME

METHOD OF MANUFACTURING ELECTRONIC DEVICE USING CYCLIC DOPING PROCESS, AND ELECTRONIC DEVICE MANUFACTURED BY THE SAME

One embodiment of the present invention provides a method of manufacturing an electronic device using a cyclic doping process including i) an operation of forming a unit transfer thin film including a two-dimensional material on a transfer substrate, ii) an operation of doping the unit transfer thin...

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Bibliographische Detailangaben
Hauptverfasser: KIM, Hee Ju, TAK, Hyun Woo, KIM, Ki Seok, YEOM, Geun Young, YU, Seong Jae, KIM, Ki Hyun, JANG, Yun Jong, JI, You Jin, KIM, Doo San, KANG, Ji Eun
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:One embodiment of the present invention provides a method of manufacturing an electronic device using a cyclic doping process including i) an operation of forming a unit transfer thin film including a two-dimensional material on a transfer substrate, ii) an operation of doping the unit transfer thin film in a low-damage doping process, iii) an operation of transferring the unit transfer thin film doped according to the operation ii) on a transfer target substrate, and iv) an operation of repeatedly performing the operations i) to iii) several times to reach a target thickness.