OPTICAL PHASE SHIFTER WITH ONE OR MORE INTEGRATED THERMOELECTRIC DEVICES

Structures including an optical phase shifter and methods of forming a structure including an optical phase shifter. The structure comprises an optical phase shifter including a waveguide core having a first branch and a second branch laterally spaced from the first branch. The structure further com...

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Bibliographische Detailangaben
Hauptverfasser: Jain, Vibhor, Srivastava, Ravi Prakash, Bian, Yusheng, Aboketaf, Abdelsalam, Pandey, Shesh Mani
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Structures including an optical phase shifter and methods of forming a structure including an optical phase shifter. The structure comprises an optical phase shifter including a waveguide core having a first branch and a second branch laterally spaced from the first branch. The structure further comprises a thermoelectric device including a first plurality of pillars and a second plurality of pillars that alternate with the first plurality of pillars in a series circuit. The first plurality of pillars and the second plurality of pillars disposed adjacent to the first branch of the waveguide core, the first plurality of pillars comprises an n-type semiconductor material, and the second plurality of pillars comprises a p-type semiconductor material.