BLADE-TYPE END EFFECTOR WITH ANGULAR COMPLIANCE MECHANISM

BLADE-TYPE END EFFECTOR WITH ANGULAR COMPLIANCE MECHANISM

Disclosed herein are wafer handling robots and related systems for providing a blade-type end effector that has a built-in compliance mechanism that allows the end effector blades to rotate by a small amount relative to a wrist unit housing of the end effector wrist unit due to gravitational loading...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Senn, Brandon Lee, Ditmore, Charles N, Embertson, Ross C
Format: Patent
Sprache:eng
Schlagworte:
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
TRANSPORTING
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Beschreibung
Zusammenfassung:Disclosed herein are wafer handling robots and related systems for providing a blade-type end effector that has a built-in compliance mechanism that allows the end effector blades to rotate by a small amount relative to a wrist unit housing of the end effector wrist unit due to gravitational loading in both a first configuration and a second configuration in which the wrist unit housing is flipped upside down from the first configuration. Such a system may be used in conjunction with end effector blades made of high-stiffness materials such as silicon carbide, allowing such end effector blades to be used in conditions that normally require end effector blades made of more compliant materials.