AMORPHOUS SILICON THIN-FILM TRANSISTOR, METHOD FOR PREPARING SAME, AND DISPLAY PANEL

Provided is an amorphous silicon thin-film transistor including an amorphous silicon semiconductor layer, a source electrode, and a drain electrode that are successively disposed on a base substrate. Ions doped by an ion implantation process are present in a region, proximal to the source electrode...

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Hauptverfasser: Gao, Yun, Hou, Lin, Fang, Yezhou, Wang, Chenglong, Li, Kai, Yao, Lei, Su, Haidong, Yang, Hua, Li, Feng, Yan, Lei, Zhu, Xiaogang
Format: Patent
Sprache:eng
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Zusammenfassung:Provided is an amorphous silicon thin-film transistor including an amorphous silicon semiconductor layer, a source electrode, and a drain electrode that are successively disposed on a base substrate. Ions doped by an ion implantation process are present in a region, proximal to the source electrode and the drain electrode, of the amorphous silicon semiconductor layer. A concentration of the ions in a surface region, proximal to the source electrode and the drain electrode, of the amorphous silicon semiconductor layer is greater than or equal to 5*10{circumflex over ( )}20 atoms/cc.