TECHNOLOGIES FOR RIBBON FIELD EFFECT TRANSISTORS WITH VARIABLE FIN CHANNEL DIMENSIONS

Technologies for ribbon field-effect transistors with variable nanoribbon channel dimensions are disclosed. In an illustrative embodiment, a stack of semiconductor nanoribbons are formed, with each semiconductor nanoribbon having a source region, a channel region, and a drain region. Some or all of...

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Bibliographische Detailangaben
Hauptverfasser: Huang, Cheng-Ying, Wiedemer, Jami A, Clinton, Evan A, Radosavljevic, Marko, Galatage, Rohit V, Qayyum, Munzarin F
Format: Patent
Sprache:eng
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Zusammenfassung:Technologies for ribbon field-effect transistors with variable nanoribbon channel dimensions are disclosed. In an illustrative embodiment, a stack of semiconductor nanoribbons are formed, with each semiconductor nanoribbon having a source region, a channel region, and a drain region. Some or all of the channel regions can be selectively narrowed and/or thinned, allowing for the drive and/or leakage current to be tuned. In some embodiments, one or more of the semiconductor nanoribbons near the top of the stack can be narrowed and/or thinned. In other embodiments, one or more of the semiconductor nanoribbons at or closer to the bottom of the stack can be narrowed and/or thinned.