CHARGED PARTICLE BEAM COLUMN, CHARGED PARTICLE BEAM CHROMATIC ABERRATION CORRECTOR, AND METHOD OF CORRECTING CHARGED PARTICLE BEAM CHROMATIC ABERRATION

CHARGED PARTICLE BEAM COLUMN, CHARGED PARTICLE BEAM CHROMATIC ABERRATION CORRECTOR, AND METHOD OF CORRECTING CHARGED PARTICLE BEAM CHROMATIC ABERRATION

A charged particle beam chromatic aberration corrector is described. The charged particle beam chromatic aberration corrector includes a plurality of electrical conductors forming a segmented Wien filter including a plurality of Wien filter segments having at least a first Wien filter segment and a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Kruit, Pieter, Breuer, John
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A charged particle beam chromatic aberration corrector is described. The charged particle beam chromatic aberration corrector includes a plurality of electrical conductors forming a segmented Wien filter including a plurality of Wien filter segments having at least a first Wien filter segment and a second Wien filter segment, wherein the first Wien filter segment is arranged for traversal of a first portion of the charged particle beam, and the second Wien filter segment is arranged for traversal of a second portion of the charged particle beam; and a power supply system configured for generating different electric fields and different magnetic fields for the first Wien filter segment and second Wien filter segment.