APPARATUS AND METHOD FOR DETECTING FINE PARTICLES

APPARATUS AND METHOD FOR DETECTING FINE PARTICLES

Provided is an apparatus configured to detect fine particles, including a fine particle trap including a plurality of through holes that are configured to trap the fine particles, a measurer including a light source configured to emit light to the plurality of through holes, and a detector configure...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YOUN, Hyung Jun, JUNG, Won Jong, JANG, Hyeong Seok, LEE, Jae Hong, KIM, Jin Ha, NAMKOONG, Kak
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Provided is an apparatus configured to detect fine particles, including a fine particle trap including a plurality of through holes that are configured to trap the fine particles, a measurer including a light source configured to emit light to the plurality of through holes, and a detector configured to detect light scattered, reflected, or transmitted through the plurality of through holes and measure a spectrum, and a processor configured to estimate a number of the fine particles trapped in the plurality of through holes based on of the measured spectrum, wherein the plurality of through holes have a diameter equal to or less than 10 μm.