OPTICAL MEASUREMENT DEVICE

An optical measurement device includes: a measurement region in which a measurement object is disposed; a light beam scanning unit that irradiates the measurement region with light beam and scans the light beam in a scanning direction intersecting with an irradiation direction of the light beam; a l...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Hayashi, Takumi, Narumiya, Kohei, Imaizumi, Ryoichi
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An optical measurement device includes: a measurement region in which a measurement object is disposed; a light beam scanning unit that irradiates the measurement region with light beam and scans the light beam in a scanning direction intersecting with an irradiation direction of the light beam; a light receiving unit that receives the light beam that has passed through the measurement region and outputs a light receiving signal; a signal processing unit that outputs data indicative of a dimension in the scanning direction of the measurement object based on the light receiving signal; and an optical path cover that is configured to be removably attachable to a housing of the light beam scanning unit and covers an optical path of the light beam in a range from the housing to the measurement object.