Surface Characterization Module and System Including Same

Various embodiments of a module or apparatus for characterization of surface quality of a surface of a substrate and a system that includes such apparatus are disclosed. The apparatus includes a sensor configured to detect at least one property of the surface of the substrate or ambient environment...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Vance, Victor F, Lahti, Kaitlyn M, Platta, Marti Marie Joyer, Biernath, Rolf W, Kobe, James J, Przepasniak, Anne Marie, Kobe, Taylor J, Nyland, Bridget E, Latron, Damien
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Various embodiments of a module or apparatus for characterization of surface quality of a surface of a substrate and a system that includes such apparatus are disclosed. The apparatus includes a sensor configured to detect at least one property of the surface of the substrate or ambient environment and provide a value indicative of the at least one property, and a processor coupled to the sensor. The processor is configured to determine at least one surface quality parameter of the surface based upon the value provided by the sensor, and determine at least one processing parameter for a surface bonding application based upon the at least one surface quality parameter.