METHOD FOR PRODUCING A FILTER AND A FILTER

METHOD FOR PRODUCING A FILTER AND A FILTER

A method for producing a filter, the method comprisingproviding a first layer above a substrate;providing a block copolymer layer above the first layer;converting the block copolymer layer to a mask by selectively removing domains of the block copolymer layer;etching pores through the first layer in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUMBERT, Aurelie, WIERINGA, Fokko, VAN ROY, Willem, LANGEREIS, Geert, SEEMA SASEENDRAN, Sandeep, CUMMINS, Cian
Format: Patent
Sprache:eng
Schlagworte:
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Beschreibung
Zusammenfassung:A method for producing a filter, the method comprisingproviding a first layer above a substrate;providing a block copolymer layer above the first layer;converting the block copolymer layer to a mask by selectively removing domains of the block copolymer layer;etching pores through the first layer in regions exposed by the mask; andforming a channel through the substrate, the channel being configured to provide fluid communication between a first and a second end of the channel, the first end of the channel being directly below the etched pores of the first layer,whereby fluid passing through the channel and the pores is filtered by the pores, when the filter is in use.