FERROELECTRIC MEMORY DEVICE AND METHOD FOR FORMING THE SAME

A memory device includes a plurality of memory cells and a periphery circuit. Each memory cell includes at least one first transistor, at least one first interconnection layer formed over the first transistor and in electrical contact with the at least one transistor, and at least one capacitor elec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Sun, Jianhua, Guo, Meilan, Lu, Zhenyu, Hu, Yushi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A memory device includes a plurality of memory cells and a periphery circuit. Each memory cell includes at least one first transistor, at least one first interconnection layer formed over the first transistor and in electrical contact with the at least one transistor, and at least one capacitor electrically coupled to the at least one first transistor through the at least one first interconnection layer. A routing structure disposed over the plurality of memory cells and the periphery circuit to electrically connect the plurality of memory cells and the periphery circuit. A second interconnection layer is disposed over the routing structure. The at least one capacitor is disposed between the routing structure and a topmost conductive layer of the at least one first interconnection layer. The second interconnection layer includes no more than one conductive layer.