DIFFERENTIAL SUSPENDED SINGLE-LAYER GRAPHENE NANOPORE SENSOR, AND PREPARATION METHOD THEREFOR AND USE THEREOF

Provided is a preparation method for a differential suspended single-layer graphene nanopore sensor. The method includes: forming a SiO2 layer on a silicon substrate layer, and etching a side of the silicon substrate layer facing away from the SiO2 layer to form a groove; forming a graphene strip un...

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Bibliographische Detailangaben

Hauptverfasser:	ZHAO, Shuaiyi, XIE, Siqi, ZHU, Hongxin, WANG, Haidong, ZHOU, Yaohong
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY TESTING
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