DIFFERENTIAL SUSPENDED SINGLE-LAYER GRAPHENE NANOPORE SENSOR, AND PREPARATION METHOD THEREFOR AND USE THEREOF

DIFFERENTIAL SUSPENDED SINGLE-LAYER GRAPHENE NANOPORE SENSOR, AND PREPARATION METHOD THEREFOR AND USE THEREOF

Provided is a preparation method for a differential suspended single-layer graphene nanopore sensor. The method includes: forming a SiO2 layer on a silicon substrate layer, and etching a side of the silicon substrate layer facing away from the SiO2 layer to form a groove; forming a graphene strip un...

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Hauptverfasser: ZHAO, Shuaiyi, XIE, Siqi, ZHU, Hongxin, WANG, Haidong, ZHOU, Yaohong
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY
TESTING
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creator ZHAO, Shuaiyi
XIE, Siqi
ZHU, Hongxin
WANG, Haidong
ZHOU, Yaohong
description Provided is a preparation method for a differential suspended single-layer graphene nanopore sensor. The method includes: forming a SiO2 layer on a silicon substrate layer, and etching a side of the silicon substrate layer facing away from the SiO2 layer to form a groove; forming a graphene strip unit on the SiO2 layer, the graphene strip unit including two single-layer grapheme stripes arranged at an interval and stretched across the groove; depositing a metal electrode layer, the electrode layer formed at one side of the groove covering the two single-layer grapheme stripes simultaneously, the electrode layer formed at another side of the groove including two parts arranged at an interval and each covering one of the two single-layer graphene strips; etching away the silicon dioxide layer that is exposed in the region of the groove; and punching nanopores in one of the two single-layer graphene strips suspending.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY
TESTING
title DIFFERENTIAL SUSPENDED SINGLE-LAYER GRAPHENE NANOPORE SENSOR, AND PREPARATION METHOD THEREFOR AND USE THEREOF
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