METHODS FOR CREATING A TRENCH IN A SAMPLE, AND COMPUTER PROGRAM PRODUCT

A method for creating a trench with a defined intended trench depth in a sample uses a particle beam system configured to create a particle beam to ablate material from the sample. An exemplary method comprises: defining a particle beam system setting which is a setting of the particle beam system for implementing an ablation unit step with the particle beam; acquiring calibration data records using the defined particle beam system setting on a calibration sample; determining a regression curve based on the acquired calibration data records, the regression curve being defined on the basis of at least one parameter that characterizes the ablation unit step; determining an implementation number based on the determined regression curve and the intended trench depth; and creating a trench in the sample by repeatedly implementing the ablation unit step with the particle beam system setting in accordance with the determined implementation number.