SYSTEMS AND METHODS TO DETECT ROTATION OF A VIBRATORY POLISHER

Example systems and methods for detecting movement of a sample subject to a polishing operation in a vibratory polisher. The system includes a sample holder to secure the sample to be polished. A housing supports a platen upon which the sample holder is placed. The platen allows for movement of the...

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Bibliographische Detailangaben
Hauptverfasser: Castanon, Heber I, Ceckowski, Douglas A, Weber, Timothy P
Format: Patent
Sprache:eng
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Zusammenfassung:Example systems and methods for detecting movement of a sample subject to a polishing operation in a vibratory polisher. The system includes a sample holder to secure the sample to be polished. A housing supports a platen upon which the sample holder is placed. The platen allows for movement of the sample holder during a polishing operation as the sample holder traverses a polishing fluid distributed about the platen. One or more sensors are arranged about the housing, operable to monitor movement of the sample holder on the platen relative to the housing.