SURFACE TREATMENT DEVICE AND METHOD

SURFACE TREATMENT DEVICE AND METHOD

A surface treatment device for treating a surface of a substrate support, wherein the surface treatment device comprises a contacting surface that is configured to contact the surface of the substrate support. The contacting surface is configured with at least a first contour with a first centre of...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: AZIMI, Monim, LINDEIJER, Tjarco, DIJKSTRA, Michel, TROMP, Siegfried Alexander, SRIDHAR, Ashwin
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A surface treatment device for treating a surface of a substrate support, wherein the surface treatment device comprises a contacting surface that is configured to contact the surface of the substrate support. The contacting surface is configured with at least a first contour with a first centre of curvature and a second contour with a second centre of curvature, wherein the first centre of curvature and the second centre of curvature are non-coincident points.