ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES

A method includes receiving, by a processing device, first trace data associated with a first processing chamber, wherein the first processing chamber satisfies one or more performance metrics. The method further includes generating target trace data based on the first trace data associated with the...

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Bibliographische Detailangaben

Hauptverfasser:	Dao, Mimi-Diemmy, Bhatia, Sidharth, Li, Thomas, Ummethala, Upendra, Babayan, Steven, Lindley, Roger, Howells, Michael
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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