ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES

ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES

A method includes receiving, by a processing device, first trace data associated with a first processing chamber, wherein the first processing chamber satisfies one or more performance metrics. The method further includes generating target trace data based on the first trace data associated with the...

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Bibliographische Detailangaben
Hauptverfasser: Dao, Mimi-Diemmy, Bhatia, Sidharth, Li, Thomas, Ummethala, Upendra, Babayan, Steven, Lindley, Roger, Howells, Michael
Format: Patent
Sprache:eng
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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Beschreibung
Zusammenfassung:A method includes receiving, by a processing device, first trace data associated with a first processing chamber, wherein the first processing chamber satisfies one or more performance metrics. The method further includes generating target trace data based on the first trace data associated with the first processing chamber. The method further includes receiving second trace data associated with a second processing chamber, wherein the second processing chamber does not satisfy the one or more performance metrics. The method further includes generating, based on the target trace data and the second trace data, a first recommended corrective action associated with the second processing chamber, wherein the first recommended corrective action includes updating one or more equipment constants of the second processing chamber. The method further includes performing the first recommended corrective action.