Semiconductor Structure and Method of Making the Same
A semiconductor structure includes: an electrode cover layer; a first conductive structure on the electrode cover layer; a contact structure, including a first and a first contact layera. The first contact layer is in contact with the first conductive structure, the bottom of the second contact laye...
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Sprache: | eng |
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Zusammenfassung: | A semiconductor structure includes: an electrode cover layer; a first conductive structure on the electrode cover layer; a contact structure, including a first and a first contact layera. The first contact layer is in contact with the first conductive structure, the bottom of the second contact layer is in contact with the top of the first contact layer, the width of the first contact layer is greater than the width of the bottom of the second contact layer, the lower surface of the contact structure is not lower than the lower surface of the electrode cover layer, and the resistivity of the first conductive structure is not greater than that of the contact structure and is not greater than that of the electrode cover layer. The contact area between contact structure and electrode covering layer is increased, thus avoiding voids in the contact structure, reducing contact and volume resistance between the contact and the capacitance under the electrode covering layer. |
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