SEMICONDUCTOR DEVICE AND METHODS OF FORMING PATTERNS

SEMICONDUCTOR DEVICE AND METHODS OF FORMING PATTERNS

A semiconductor device includes an active pattern having sharp corners. The semiconductor device includes a peripheral circuit including a substrate, a resistor device in the substrate, and an active pattern on the substrate. When viewed in a plan view, the active pattern includes corners in a serpe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Choi, Seungwook, Han, Jeehoon, Hong, Taeyoon, MIN, Juseong, Yoon, Taekkyu, Baek, Jae-Bok
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor device includes an active pattern having sharp corners. The semiconductor device includes a peripheral circuit including a substrate, a resistor device in the substrate, and an active pattern on the substrate. When viewed in a plan view, the active pattern includes corners in a serpentine shape, and first and second shapes of the corners are different from each other.