COMPOUND-SEMICONDUCTOR WAVEGUIDES WITH AIRGAP CLADDING

Structures for a waveguide and methods of forming a waveguide. The structure comprises a substrate, a waveguide core comprising a compound semiconductor material, and a layer disposed on the substrate. The layer comprises the compound semiconductor material, and the layer includes a cavity positione...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Adusumilli, Siva P, Bian, Yusheng, Levy, Mark
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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