COMPOUND-SEMICONDUCTOR WAVEGUIDES WITH AIRGAP CLADDING

COMPOUND-SEMICONDUCTOR WAVEGUIDES WITH AIRGAP CLADDING

Structures for a waveguide and methods of forming a waveguide. The structure comprises a substrate, a waveguide core comprising a compound semiconductor material, and a layer disposed on the substrate. The layer comprises the compound semiconductor material, and the layer includes a cavity positione...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Adusumilli, Siva P, Bian, Yusheng, Levy, Mark
Format: Patent
Sprache:eng
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:Structures for a waveguide and methods of forming a waveguide. The structure comprises a substrate, a waveguide core comprising a compound semiconductor material, and a layer disposed on the substrate. The layer comprises the compound semiconductor material, and the layer includes a cavity positioned beneath the waveguide core.