ULTRAPURE WATER PRODUCTION SYSTEM
An ultrapure water production system capable of producing ultrapure water from which fine particles have been highly removed and supplying the ultrapure water to a point of use is equipped with at least an ultrafiltration membrane device, and includes: a first organic porous ion exchanger provided a...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An ultrapure water production system capable of producing ultrapure water from which fine particles have been highly removed and supplying the ultrapure water to a point of use is equipped with at least an ultrafiltration membrane device, and includes: a first organic porous ion exchanger provided at a position downstream of the ultrafiltration membrane device in an ultrapure water supply line for supplying the ultrapure water to the point of use; and a microfiltration membrane device provided, in the ultrapure water supply line, at a position downstream of the first organic porous ion exchanger. |
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