SURFACE EMITTING LASER AND METHOD FOR MANUFACTURING SURFACE EMITTING LASER

The present technology provides a surface emitting laser capable of improving flatness of a surface of a buried layer while reducing diffraction loss of light in the buried layer.The surface emitting laser according to present technology includes a first structure including a first multilayer film r...

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Bibliographische Detailangaben
Hauptverfasser: NAKAJIMA, Hiroshi, SHIOMI, Michinori, YOKOZEKI, Mikihiro, WATANABE, Tomomasa
Format: Patent
Sprache:eng
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Zusammenfassung:The present technology provides a surface emitting laser capable of improving flatness of a surface of a buried layer while reducing diffraction loss of light in the buried layer.The surface emitting laser according to present technology includes a first structure including a first multilayer film reflector, a second structure including a second multilayer film reflector, and a resonator disposed between the first and second structures, in which the resonator includes an active layer, a tunnel junction layer disposed between the first structure and the active layer and having a mesa and an adjacent region adjacent to the mesa, and a buried layer that buries a periphery of the mesa and a periphery of the adjacent region, and an interval between the mesa and the adjacent region is less than or equal to 30 μm.