PROCESSING DEVICE, INSPECTION APPARATUS AND SYSTEM FOR OPTICAL INSPECTION AND CORRESPONDING METHODS

A processing device to be used in an inspection apparatus for optical inspection of samples is configured to be used with an optical inspection device, to be communicatively coupled to a user interface, to receive input data from the user interface and/or from the optical inspection device, and to p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG, Fei, ZHOU, YuanPing, FENG, Shengwei, LI, Minquan, YANG, ChunXin, ZHAO, Wei, JIAO, Linqi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A processing device to be used in an inspection apparatus for optical inspection of samples is configured to be used with an optical inspection device, to be communicatively coupled to a user interface, to receive input data from the user interface and/or from the optical inspection device, and to provide output data to the user interface, and to be communicatively coupled to at least one other processing device to allow data transfer. The processing device is configured as a master unit, and the at least one other processing device is configured as a slave unit. The processing device is further configured to provide a data storage for storing data received as input and/or to be provided as output, and to allow the at least one other processing device to access the data storage to store data and/or to retrieve data.