MANUFACTURING METHOD OF DISPLAY APPARATUS AND DISPLAY APPARATUS

MANUFACTURING METHOD OF DISPLAY APPARATUS AND DISPLAY APPARATUS

A method for manufacturing a novel display apparatus is provided. The method includes a first step of forming a first electrode, a second electrode, and a first gap over an insulating film, a second step of forming a first film over the second electrode; a third step of forming a first layer overlap...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IDOJIRI, Satoru, KAWAKAMI, Sachiko, OHIDE, Takayuki, ADACHI, Hiroki, YAMAWAKI, Hayato, NAKAZAWA, Yasutaka, OKAZAKI, Kenichi, GOTO, Naoto
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:A method for manufacturing a novel display apparatus is provided. The method includes a first step of forming a first electrode, a second electrode, and a first gap over an insulating film, a second step of forming a first film over the second electrode; a third step of forming a first layer overlapping with the first electrode, a fourth step of removing the first film by an etching method to form a first unit overlapping with the first electrode, a fifth step of removing a surface of the second electrode, a sixth step of forming a second film over the first layer and the second electrode, a seventh step of forming a second layer overlapping with the second electrode, and an eighth step of removing the second film by an etching method using the second layer to form a second unit overlapping with the second electrode and a second gap.