Microelectromechanical Device for Generating Sound Pressure

Microelectromechanical Device for Generating Sound Pressure

Embodiments generally relate to drives for microelectromechanical devices for generating a sound pressure that can be implemented in a microelectromechanical system (MEMS). The movable legs of the actuators are connected to one another by means of connecting elements and form a lateral surface, the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Klemm, Markus, Unamuno, Anartz
Format: Patent
Sprache:eng
Schlagworte:
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Beschreibung
Zusammenfassung:Embodiments generally relate to drives for microelectromechanical devices for generating a sound pressure that can be implemented in a microelectromechanical system (MEMS). The movable legs of the actuators are connected to one another by means of connecting elements and form a lateral surface, the volume of which can be changed by the movement of the legs to generate a sound pressure.