Defect Classification Device and Defect Classification Program

An object of the present disclosure is to provide a defect classification device capable of easily grasping an appropriate recipe update timing of an imaging device when classification accuracy for classifying defects existing on a semiconductor wafer is decreased. The defect classification device a...

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Bibliographische Detailangaben
Hauptverfasser: HIRAI, Takehiro, MINEKAWA, Yohei, TAKADA, Satoshi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An object of the present disclosure is to provide a defect classification device capable of easily grasping an appropriate recipe update timing of an imaging device when classification accuracy for classifying defects existing on a semiconductor wafer is decreased. The defect classification device according to the present disclosure calculates classification accuracy by further acquiring a result of a manual classification for defects spanning a plurality of classification spaces as a result of an automatic classification, and comparing the result of the automatic classification with the result of the manual classification (see FIG. 5).