MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM

A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary w...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OTSUKA, Tsuyoshi, TERAMOTO, Akihiro, SEKIMOTO, Eiichi, YANO, Mitsuteru, ITO, Teppei, MASAKI, Youichi, TAKAYANAGI, Koji
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY GENERATION
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Beschreibung
Zusammenfassung:	A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor; and a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor.