CHEMICAL TEST APPARATUS AND SUBSTRATE PROCESSING APPARATUS

CHEMICAL TEST APPARATUS AND SUBSTRATE PROCESSING APPARATUS

Provided is a chemical test apparatus for testing a chemical used to process a substrate, the chemical test apparatus including a first line providing an inlet through which the chemical is introduced, and a passage through which the chemical moves, a second line having an end and another end connec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHOI, Gi Hun, PARK, Sangwoo, YANG, Seungtae, KIM, Seong Hyeon
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:Provided is a chemical test apparatus for testing a chemical used to process a substrate, the chemical test apparatus including a first line providing an inlet through which the chemical is introduced, and a passage through which the chemical moves, a second line having an end and another end connected to two separate points of the first line, and providing a passage in which the chemical introduced into the first line is filled, a discharge line connected to a lower end of the first line, and a valve disposed between the first line and the discharge line at least below portions of the first line connected to the second line, to open or close a passage through which the chemical moves from the first line to the discharge line.