MASS SPECTROMETER AND POWER SUPPLY DEVICE

A power supply device applies a voltage to a quadrupole mass filter. The power supply device has a main substrate and a wave-detection substrate. The main substrate includes a detector. The wave-detection substrate includes a wave detector and an identifier. The wave detector detects an AC component...

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Bibliographische Detailangaben
1. Verfasser: MIZUTANI, Shiro
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A power supply device applies a voltage to a quadrupole mass filter. The power supply device has a main substrate and a wave-detection substrate. The main substrate includes a detector. The wave-detection substrate includes a wave detector and an identifier. The wave detector detects an AC component of a voltage to be applied to the quadrupole mass filter as a wave-detection voltage. The identifier outputs identification information of the wave detector defined in correspondence with the configuration of a rectifying device of the wave detector. The detector detects identification information output by the identifier, and supplies the detected identification information to a corrector that corrects a deviation of voltage caused by a leakage current of the rectifying device.