MICRO DEVICE WITH SHEAR PAD

An example method includes forming and patterning an etch assist layer on a first dielectric layer such that the etch assist layer is not over a first bond pad; forming and patterning a first photoresist layer on a second patterned conductive layer on the first dielectric, wherein the first photoresist layer is not over the first bond pad and etching the second dielectric layer to a depth of 5 to 15% of a thickness of the first dielectric layer and the second dielectric layer; etching the first dielectric layer and second dielectric layer using a second photoresist layer to a depth of 20 to 25%; and exposing the first bond pad by etching the first dielectric layer using a patterned third photoresist layer, such that an area of the dielectric layer exposed by the third opening adjacent to the bond pad is between 3-5 μm thick.