SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME

A method for manufacturing a semiconductor structure includes: forming first base which includes first substrate and active areas arranged in an array along first direction and second direction in first substrate, word lines being disposed in first base, extending along second direction and covering...

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Bibliographische Detailangaben
1. Verfasser: GUI, Huihui
Format: Patent
Sprache:eng
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Zusammenfassung:A method for manufacturing a semiconductor structure includes: forming first base which includes first substrate and active areas arranged in an array along first direction and second direction in first substrate, word lines being disposed in first base, extending along second direction and covering at least opposite sides of each active area; forming charge storage structures electrically connected with first ends of active areas on first base; forming second base which includes second substrate and bit lines disposed in second substrate, bit lines extending along first direction; connecting first base and second base by using a first surface of first base away from charge storage structures and a second surface of second base having structures of bit lines as connection surfaces, bit lines being electrically connected with second ends of active areas, and each first end being disposed opposite to a corresponding second end.